Fundamentals of Lithography Figure 1 shows a typical lithography process for defining shallow trench isolation features. This process includes the following steps: 1. Substrate Cleaning and Preparation 2. Form a thermal oxide layer and deposit a layer of silicon nitride on a clean substrate 3. Deposit a carbon hard mask followed by a layer of anti-reflection material 4. Deposit a layer of photoresist 5. Pre-baked photoresist 6. Align the substrate/resist and reticle and expose the photoresist using UV radiation and 4x-5x imaging. Repeat steps and scan 7. Post-exposure bake 8. Develop pattern in photoresist and hard bake to remove residual solvent 9. Perform an etch to open the Dielectric Anti-Reflection Coating (DARC) and hardmask patterns, and remove the photoresist and DARC 10. Perform an etch to open trenches in the substrate and remove the hardmask 11. Clean the surface Deep UV Lithography DUV technology for lithography is entirely based on projection optics, as the pattern on the photomask is much larger than the final pattern formed on the photoresist. The optical system in a 193 nm lithography tool is called a catadioptric system. The term means it uses lens (refractive) and reflective (reflection) elements to direct and condition the light from the laser Extreme UV Lithography EUV lithography is being developed to meet single-exposure patterning requirements for sub-22nm feature sizes (Figure 3). What makes this technology unique is the nature of the light source. See Extreme UV Lithography for more information. Hecho Fiber specializing in design and manufacture Fiber Optic Bundles and Fiber Optic Light Sources for over 18 years, the Fiber Products are widely used for Semiconductor filed, such as Laser Direct Imaging LDI Fiber Bundle, Fiber Optic Line Lights for AOI, and so on. OEM and ODM service is available to meet the differentiated needx of different customers.

According to the latest report from IC Insights, a well-known market research institution, the total installed capacity of global semiconductors will reach 263.6 million 8-inch equivalent wafers this year, a year-on-year increase of 8.7% and a record high. The increase in semiconductor production capacity this year is mainly due to the new large-scale memory factories of SK Hynix and Winbond, as well as the active expansion of TSMC, including the capacity growth of two advanced 5nm and 3nm processes, and the expansion of 28nm process capacity in Nanjing. TSMC is forecasting capital expenditures of more than $40 billion this year. In the past five years, the annual growth rate of global semiconductor production capacity has increased from 4.0% in 2016 to 8.5% in 2021. Despite inflationary pressures, ongoing supply chain issues and other economic difficulties, semiconductor demand is strong, with shipments set to grow 9.2% year over year this year. Even with 10 new fabs coming into use this year, capacity utilization could reach a high of 93% this year, slightly lower than 93.8% in 2021. The historical statistics of IC Insights show that the growth rate of semiconductor production capacity shows a certain periodicity, with the first negative growth in 2002, and a relatively large negative growth of -6% in 2009; then it entered a boom period, which has continued to this day. The first two negative growths were the end of the dot-com bubble crisis and the global financial crisis. Hecho Technology provides various non-standard Customized Optical Fiber and light sources, such as AOI Line Lights, LDI Laser Direct Imaging Fiber Bundle, wafer cutting, automation and other fields widely used in the semiconductor industry, to help the development of the semiconductor industry.

Laser direct imaging refers to Laser Direct Imaging, abbreviated as LDI, which belongs to a type of direct imaging. The light is emitted by an ultraviolet laser and is mainly used for the exposure process in the PCB manufacturing process. The imaging quality of LDI technology is clearer than that of traditional exposure technology, and it has obvious advantages in mid-to-high-end PCB manufacturing. With the rapid progress of PCB design requirements, corresponding high-tech is required in the PCB production process (thinner materials, more complex structures, and finer graphics requirements within the range of micro-errors), traditional contact stencils Exposure and development technology can no longer meet the needs of such high-end PCB applications. This demand has led to changes in production technology, from contact stencil exposure and development to direct laser imaging. A software-controlled laser or laser source is used to laser image a photoresist-coated PCB, or to cure and image a solder mask at the end of the PCB process. Hecho specializes in the production of LDI optical fiber bundle, and can provide customized services for different branch numbers, lengths, and connectors according to customer needs. With strong R&D and production capabilities, it can flexibly meet the differentiated needs of different customers. Hecho also supply customized service for AOI Line light guides, and other Fiber Optic Bundles which for Optical Inspection equipment uses. LDI (Laser Direct Imaging) Industrial Chain Upstream Midstream Downstream Equipment Manufacturer Motion platform and components Orbotech HDI and Standard PCB Graphic generation module HAN'S LASER Thick copper and ceramic PCB The light path components CFMEE Super size PCB The exposure light source ORC Manufacturing Others Automatic control unit Limata Others Others

What is biochemical analysis? Biochemical analysis refers to the detection method of enzymes, carbohydrates, lipids, protein and non-protein nitrogen, inorganic elements, liver function and other indicators in the body through various biochemical reactions. It is mainly used in routine testing in hospitals. Biochemical diagnosis developed earlier in my country and is a routine diagnostic testing item in hospitals, focusing on disease monitoring that has already occurred. At present, the domestic biochemical diagnostic reagent market is relatively mature, with a complete range of reagents. Domestic brands have occupied about two-thirds of the domestic biochemical diagnostic reagent market by virtue of the advantages of cost-effective products and high-quality market services. What is an immunoassay? Immunoassay is a highly selective diagnostic method established by using the specific reaction between the substance to be tested and its corresponding substance. It is often detected by the immune reaction of antigen and antibody, and various carriers are used to amplify the reaction signal to enhance the detection. Sensitivity (labels include isotopes, enzymes, chemiluminescence substances), including radioimmunity, enzyme-linked immunity, chemiluminescence, etc., mainly to test small molecular proteins, hormones, fatty acids, drugs and other substances in the body, commonly used in infectious diseases, endocrine Detection of protein targets such as diseases, tumors, pregnancy tests, blood group antigens, etc. At present, high-end chemiluminescence has gradually replaced ELISA as the mainstream immunodiagnostic method in my country, focusing on the monitoring of infected diseases. ELISA: ELISA markers are enzymes, which are often used to detect an antigen or antibody. Reagents have the characteristics of low cost and large-scale operation, and are currently the mainstream of domestic immunodiagnostic reagents. Chemiluminescence: Chemiluminescence reagents have high sensitivity, strong specificity, and good reproducibility. They can be used for highly automated semi-quantitative and quantitative analysis, and have fast detection time and good reproducibility. It is one of the important development directions of immunological reagents. Hecho specializing in design and manufacture the Fiber Optic Cable, Optical Fiber Bundle, and Fiber Optic Light Guide for Biochemical diagnostic, Immunoassay, Molecular diagnostic, and for POCT, IVD application. Hecho supply the Customized Optical Fiber Cable which can meet the differentiated needs of different customers.

Article source: LIMATA's official website. LIMATA's own patent LUVIR. LUVIR high-efficiency solder mask imaging technology includes two types, and at the same time, two laser wavelengths are integrated into a LUVIR imaging unit. This imaging unit contains a customized telecentric optical path and a high-speed (galvanometer-based) 2D scanning system: The key internally developed LUVIR solution includes precise IR energy control with a resolution of up to 0.1%, pulse and continuous wave power modules matched for IR lasers, a longer-life temperature control system, and a real-time monitoring module that integrates output power measurement. , And a remote assistance and interface make repairs and maintenance easy UV laser with IR heat injection direct imaging. In the LUVIR imaging process, the high-energy IR laser system activates the polymer of the solder resist ink by locally heating the imaging area (no thermal polymerization reaction). This ensures the accelerated polymerization of the solder mask in the UV laser imaging step, thereby increasing the efficiency up to 7 stouffer levels in all traditional types and types of solder mask processes. This integrates the unique exposure method of UV/IR lasers, and brings a huge increase in imaging speed without affecting the surface quality, resolution and accuracy of the solder mask. Improved imaging speed and output for all traditional solder mask ink types and colors. Compared with standard multi-wavelength DI machines, LUVIR with higher energy is especially suitable for imaging with high UV energy in the range of 400 – 1,000 mJ/ cm2 of all types and colors of traditional inks (such as green and black), which account for 90% of the standard PCB solder mask process inks. Efficient testing of solder mask inks with LUVIR technology includes Taiyo, Sun Chemicals, Huntsman, Electra Polymers, Peters and Nippon Polytech. The continuous use and imaging of traditional solder masks that have been process-proven further ensure process stability, protect output and Save cost (compared to the more expensive DI ink). If the factory has imported direct imaging ink type (DI) solder mask, such as a large number of PCB batches, LUVIR technology also supports all common DI inks and maintains High speed and high precision level. The LUVIR modular imaging concept has modular upgradeability. LUVIR can be configured in a modular manner on all LIMATA hardware system platforms according to the individual capacity requirements of different customers, the variety of PCB types and equipment budgets. LUVIR's capacity configuration modular configuration ranges from a single unit system (X1100_SM) to a complex and diverse product line environment 4-unit system (X2400_SM) for PCB mass production. It can also be equipped with the X3000 series platform for solder mask imaging of ultra-large PCBs (XXL products). The LUVIR imaging module can be upgraded and can be provided on site. (E.g. from 2 unit to 3 unit or 4 unit system) • LUVIR technology creates a faster material polymerization reaction speed and improves customer actual production data • There is no limitation on the exposure requirements of DI special solder mask materials, applicable to all ink types • Reliable quality LUVIR technology hardware system, promises long maintenance warranty period •Modular upgrade of optical components, saving customers' production capacity growth and purchasing equipment costs • Fast and time-saving equipment automatic precision correction system and terminal remote fast fault handling mechanism Hecho Technology chooses 125um quartz double-clad LDI fiber drawn from German Heraeus preform, standard ST/FC input, circular or linear output can be customized, stable and reliable performance.

LDI, the full name is Laser Direct Imaging, is an exposure process used in the PCB process, and the image is directly imaged on the PCB by the laser scanning method, and the image is more refined. Advantages of LDI 1. Eliminate the negative film process in the exposure process, save the time and cost of loading and unloading the negative, and reduce the deviation caused by the expansion and contraction of the negative 2. Directly image the CAM data on the pcb, saving the CAM production process 3. The image resolution is high, and the fine wire can reach about 20um, which is suitable for the production of fine wire 4. Improved the yield rate of pcb production The largest market for laser direct imaging (LDI) consumption is the Asia-Pacific region, with a market share of more than 74% in 2019. It is followed by North America, which accounts for nearly 13% of the global market. For the major manufacturers of laser direct imaging systems (LDI), Orbotech, ORC Manufacturing, SCREEN, Via Mechanics, Manz, etc. occupy major market shares. Hecho Technology develops and manufactures LDI optical fiber, and can provide customers in the industry with customized solutions for 365nm and 405nm band optical fibers.

Fluorescent fibers are composed of a fluorescent material and some rare elements incorporated into the core and cladding. The fluorescent substance can absorb light in a specific wavelength range, cause itself to be excited, and then emit fluorescence in various directions, wherein the fluorescence whose radiation direction satisfies the total reflection condition of the core-cladding interface will be transmitted along the axial direction of the optical fiber. Compared to conventional communication fibers, fluorescent fibers can receive light incident in any direction, rather than only receiving a certain range of light entering the fiber from the end face (the so-called numerical aperture problem). After the fluorescent material receives light of a certain wavelength (excited spectrum), the stimulated radiation emits light energy. The stimulated peak wavelength is different from the peak wavelength of the radiation. This phenomenon is called Stokes frequency shift. For fluorescent molecules, the Stokes shift is about 100 to 200 nm, but this value is affected by other dopants. After the excitation disappears, the persistence of fluorescent luminescence depends on the life of the excited state. This luminescence is usually attenuated exponentially, and the time constant of the decay is called the fluorescence lifetime or the fluorescence fading time. Polystyrene (PS) and PMMA doped with fluorescent substances are used as the core layer of the optical fiber, and fluororesin has the normal light transmission function as the cortical fluorescent fiber. The biggest feature is that it absorbs light from the side and emits light from the end face, emitting light color. There are red, yellow, green, violet, orange, etc. The diameter of the product is 0.5/0.75/1.0/1.5/2.0mm. At present, fluorescent fibers have been widely used in decoration, advertising and sensing (light detection such as step, gun sight, bow, arrow sight, light wavelength conversion, etc.). Nanjing Hecho Technology specializes in the production and supply of various optical fibers, such as Fiber Optic Cables, Fiber Optic Bundles, UV/VIS/IR Fiber Cables, Fiber Optic Illuminator, Optical Fiber Sensor and other products standardization and customized services.

A large number of fiber filaments are gathered into a bundle of fibers having a diameter of dB, and the basic characteristics of the bundle are the same as those of a single fiber core. The light transmission characteristics of the Fiber Optic Bundles are similar to those of a single fiber. Tilting the bundle of fibers relative to their axis affects the output light characteristics. An optical fiber with an outer ring of the beam end face converts the uneven input light into a uniform output light. Twisted fiber Parallel array of fibers Figure 1: Same input light, different output light This is possible because the direction of the twisted fiber is close to the direction of the coupling light at the input. After the light enters the fiber bundle entrance and is refracted, the light coupled to the fiber propagates in the same direction along the fiber axis. Because the light propagating in the twisted fiber at the input end has the maximum intensity at the 0° angle, that is, the fiber axis, and the output end fiber is parallel to the axis of the fiber bundle, the minimum light intensity appearing at the position of the fiber bundle axis (Fig. 1 ) will be compensated. The geometry of the fiber bundle input and output can be designed to meet the lighting needs. It can be square, rectangular, straight or with multiple branches of different shapes or sizes. In this way, the fiber optic component can pass light from one end to the other. Two Branched Light Guide Multi-branched Light Guide Line Light Guide Line Light Guide with Lens Ring Light Guide LED Light Source with Ringlights Loss in the Fiber bundles In principle, the loss mechanism of all of the above individual fibers is applicable to the fiber bundle. The fibers are tightly clamped and cured together with epoxy. This results in two additional losses, which are only related to the bundle: gap loss and cladding loss. The end of the fiber can be specially treated by heating, so that the fiber is hexagonal and arranged more closely. This reduces the gap loss and increases light transmission by 10%.

Laser processing mainly uses high-energy laser to cut, weld, punch, mark, form, surface treat, and modify doping. Commonly used light sources in the industry are CO2 gas laser (wavelength 10.6 um) and YAG solid laser (wavelength 1.064 um). Laser processing is widely used in the automotive, electronics, electrical appliances, aviation, metallurgy, machinery manufacturing, military and other industries, and plays an important role in economic development. During laser processing, laser beam irradiation interacts with the material on the workpiece to complete the machining process. Therefore, it is non-contact, non-abrasive, non-noisy (or little noise), and free from swarf. It basically does not cause pollution to the environment. Therefore, laser processing technology is a kind of green processing technology, which will inevitably be called an advanced processing technology in the 21st century. Optical transmission factors: The factors affecting the energy transfer of the fiber include the incident beam parameters, fiber end face and coupling coupling, fiber length, fiber core diameter, and radial refractive index profile of the fiber. The large-diameter fiber is often used for the transmission of multimode high power Nd:YAG laser beams, and the spatial intensity distribution of the beam at the output depends on the implantation conditions, the misalignment of the incident spot with the fiber, and the bending of the fiber. The lateral offset severely affects the distribution of meridional fibers and slanted rays within the fiber. The angular offset does not change the ratio of meridional rays to oblique rays, but changes the propagation directions of meridional rays and slanted rays in the fiber. Lateral excursion stimulates a large number of oblique rays, and the optical energy distribution of the laser output is more uniform, and the “homogenization” effect of the angle shift is weak. When the optical fiber is bent, when the total reflection condition of the light in the core cannot be satisfied, the light enters the cladding and forms an evanescent wave. The light guiding performance of the optical fiber is reduced, resulting in attenuation of light energy. In the case of laser technology and optical fiber manufacturing technology has achieved tremendous development, the use of optical fiber transmission laser beam in laser flexible processing is the best choice. The 1.06um Nd:YAG laser beam, and semiconductor lasers in the visible and near-infrared wavelengths are well suited for current commercial fiber optic transmission. The design of a reasonable fiber-optic energy transmission system must take into account the characteristics of the laser source, the laser injection conditions, the length of the fiber, the core diameter, and bending and other factors.

Holmium laser is a high-tech technology that emerged at the end of the 20th century and is one of the most advanced minimally invasive surgical techniques. It uses pulsed light to activate the pulsed laser generated by the rare element embedded in the yttrium-aluminum-garnet crystal. It uses holmium laser lithotripsy to cut, vaporize, and stop bleeding. It can smash any hard urinary tract. Stones, do not harm the body's soft tissue, a single operation stone crushing rate of more than 95%, the standard for the new age of gravel. The advantages of holmium laser lithotripsy: 1. The world's newest stone treatment method, a major breakthrough in the global minimally invasive stone. 2. It is effective for all kinds of stones (including calcium oxalate and phosphate, carbonate stones, cystine, uric acid stones, etc.). 3, No surgery, the surgical process 10 --- 20 minutes, simultaneous treatment of ureteral stenosis and polyps. 4, Accurate, safe, reliable, no bleeding. 5, Hospitalization time is short, recovery is quick, the cost is lower than traditional surgery. 6, A treatment is about to completely remove the stone, the success rate of a treatment of 98% - 100%, while the treatment rate of extracorporeal shock wave lithotripsy is only 20% - 60% (usually more than twice the treatment). 7, Soft fiber can be through the speculum straight to the stone, the crushed, so through the bladder urethroscope, ureteroscopy, nephroscopy and other into the urinary tract, all urinary tract stones can be treated to reduce trauma and patient suffering Small, restore. Under the guidance of B-ultrasound, through a ureteroscope with a skin-kidney channel diameter of only 3 mm, a holmium laser lithotripsy system was used to crush the stones and drain them along the channels. The small surgical incision (only 4 mm in diameter), compared with the traditional kidney incision and lithotripsy, greatly reduced the incidence of renal hemorrhage, rapid postoperative recovery, short hospital stay, and a high rate of stone exhaustion with good results. Minimally invasive percutaneous nephrolithotomy holmium laser lithotripsy is currently an advanced, effective, minimally invasive treatment for the treatment of kidney stones. It is praised by the majority of patients as a non-invasive lithotripsy and is a gold for modern kidney stones treatment. standard. Nanjing Hecho Technology Co., Ltd. manufactures and supplies Holmium Laser Fiber. The optical fiber material conforms to medical standards and can be sterilized and sterilized. The part that enters the human body meets the requirements of biocompatibility. Optical fiber monofilament diameter 275/365/550μm, transmission wavelength 400--2500nm, numerical aperture NA0.22, helium-neon laser fiber transmission power ≤800W/cm2 (550μm Quartz High Power Fiber, Nd:YAG CW laser), end structure SMA905 /SMA906/FC/ST and other custom structures are optional.

As a high-quality transmission medium, optical fiber is changing our lives. It promotes the development of the information age and enables people to swim and enjoy high-definition television programs on the Internet. In the medical field, the “figures” of optical fibers can be seen in both large-scale medical diagnostic imaging devices and implantable medical device products. Due to the increase in the use of fiber optics for minimally invasive surgery, the increased demand for advanced diagnostic techniques, and the rapid development of medical fiber technology, the Medical Laser Fiber market has grown at a significant rate. The number of medical optical fiber applications including X-ray imaging, ophthalmic lasers, phototherapy, laboratory and clinical diagnostics, dental headpieces, surgical and in vitro diagnostic instruments, surgical microscopes, and endoscopy has increased significantly. In addition, the miniaturization of medical devices has also increased the demand for medical fiber technology. 1. Laser Surgery Conventional laser surgery can be used in gynecology, anorectal, surgery, dermatology, dentistry, urology, etc., for treatment such as tissue cutting, vaporization, irradiation, and so on. For body surface lesions, the laser can be transmitted with a simple lens, while for the internal lesions, fiber output is required. The output of the fiber can be installed with a spherical and cylindrical laser diffuser, and can also be filled with scattering media, so that the light Spread evenly around. Among them, the low-hydroxyl silica laser fiber can be used to transmit a 2.14μm He-Ne laser, which is currently gaining more applications in the field of laser lithotripsy. In addition, Quartz Laser Fiber surgery can also be used for oral hard tissue therapy, minimally invasive pharyngeal surgery, condyloma acuminatum and other treatments. 2. Laser Therapy Directly irradiating the affected part with a weak laser (such as a Holmium Laser, a semiconductor laser, etc.) causes a series of biological effects, thereby achieving the purpose of accelerating healing or relieving pain and other auxiliary treatments. For the treatment of small areas of the body surface or part of the cavity (such as the nasal cavity, external auditory meatus, vagina, urethra), such as super pain red light treatment instrument. 3. Photodynamic therapy Photodynamic therapy mainly uses tumor tissues and normal tissues to have different affinity properties for photosensitizers. Tumor tissues absorb and retain more photosensitizers. Photochemical reactions occur under the participation of oxygen in biological tissues when irradiated with light of specific wavelengths. The generation of singlet oxygen and (or) free radicals, destruction of a variety of biological macromolecules in tissues and cells, eventually causing tumor cell death, for therapeutic purposes. An optical fiber can transmit laser light of a specific wavelength to a diseased tissue for long-distance irradiation, and the tip can be made into various shapes.

Color rendering refers to the objective effect produced by light emitted by a light source on an object and the degree of appearance of the true color of the object, which is an important indicator of the illumination light source. The light source with high color rendering performs better on the color, the color seen is close to the natural color, and the light source with low color rendering performs poorly on the color, and the color deviation seen is also large. If the light emitted by the light source contains a proportion of each color of light that is similar to natural light, the colors seen by the human eye are more realistic. The spectral distribution of the light source determines the color rendering of the light source. The color rendering of the light source affects the color of the object observed by the human eye. Quantitative evaluation of the color rendering property of the light source is an important indicator for evaluating the quality of the light source. General artificial lighting sources use the general color rendering index as an evaluation index of color rendering, and the color rendering index is also an important parameter to measure the color characteristics of the light source. According to different application fields, Nanjing Hecho Technology Co., Ltd. launched a new ultra-bright high color rendering index medical Endoscope Light Source Module; ultra-high brightness LED Cold Light Source, and Fiber Optic Illuminators and other products to meet the needs of different customers, welcome The majority of new and old customers to inquire.